Veeco FPP5000 four-point probe +
Alpha Step 500 Surface Profiler
The four point probe passes a small current though a sample to determine the material’s
sheet resistivity, slice resistivity, V/I, and metallization thickness. Extended measurement
range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001
milliohm/sq.
The Alphastep 500 is a stylus-based surface profiler to measure step heights of surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate. The vertical deflection measures the change in step height.
- Step heights from 500 Angstroms to 300 µm
- Scan length from 100 Angstroms up to 0.3 mm
- Ranges and resolutions:
- 13 µm at 1 A
- 300 µm at 25 A
- Max sample dimensions:
- 150 mm (6 inch) wide
- 15 mm (.59 inch) thick