Hitachi S-4800

Field Emission Scanning Electron Microscope (FE-SEM)

Overview

Hitachi S-4800 Field Emission Scanning Electron Microscope (FE-SEM) This state-of-the-art field emission Hitachi S-4800 SEM is a truly versatile platform comprising impressive high resolution performance and advanced detection technology. New “Super ExB Filter” collects and separates the various components of pure SE, compositional SE and BSE electron signals.

Specifications

Resolution

Accelerating voltage 15 kV, working distance 4 mm - 1.0 nm
Accelerating voltage 1 kV, working distance 1.5 mm - 2.0 nm

Magnification

High magnification mode - 100X to 800,000X
Low magnification mode - 30X to 2,000X

Electron Optics

Electron Gun - Cold cathode field emission type
Extracting voltage - 0 to 6.5 kV
Accelerating voltage - 0.5 to 30 kV
Lens - 3-stage electromagnetic lens, reduction type
Objective lens aperture - movable aperture
Astigmatism correction coil - electromagnetic type
Scanning coil - 2-stage electromagnetic-deflection type

Specimen Stage

Type I 3 axes motor stage
Tilt -5 degrees to +70 degrees
Rotation 360 degrees (continuous)
Specimen size - Max. 150 mm diameter (airlock specimen exchange)

EDS

The X-MaxN (Oxford Instruments) Silicon Drift Detector (SSD)
A range of silicon drift detector (SDD) sizes, from 150 mm2 to 20 mm2
A superb resolution that is independent of sensor size
EDS analysis at a point or over user-defined regions (Point&ID), between any two points (LineScan, TruLine, and QuantLine), EDS element mapping (LayerMap, AutoLayer and TruMap), and EDS phase mapping (AutoPhaseMap)