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Hitachi S-4800

Field Emission Scanning Electron Microscope (FE-SEM)


Hitachi S-4800 Field Emission Scanning Electron Microscope (FE-SEM)This state-of-the-art field emission Hitachi S-4800 SEM is a truly versatile platform comprising impressive high resolution performance and advanced detection technology. New “Super ExB Filter” collects and separates the various components of pure SE, compositional SE and BSE electron signals.



  • Accelerating voltage 15 kV, working distance 4 mm - 1.0 nm
  • Accelerating voltage 1 kV, working distance 1.5 mm - 2.0 nm


  • High magnification mode - 100X to 800,000X
  • Low magnification mode - 30X to 2,000X

Electron Optics

  • Electron Gun - Cold cathode field emission type
  • Extracting voltage - 0 to 6.5 kV
  • Accelerating voltage - 0.5 to 30 kV
  • Lens - 3-stage electromagnetic lens, reduction type
  • Objective lens aperture - movable aperture
  • Astigmatism correction coil - electromagnetic type
  • Scanning coil - 2-stage electromagnetic-deflection type

Specimen Stage

  • Type I 3 axes motor stage
  • Tilt -5 degrees to +70 degrees
  • Rotation 360 degrees (continuous)
  • Specimen size - Max. 150 mm diameter (airlock specimen exchange)


  • The X-MaxN (Oxford Instruments) Silicon Drift Detector (SSD)
  • A range of silicon drift detector (SDD) sizes, from 150 mm2 to 20 mm2
  • A superb resolution that is independent of sensor size
  • EDS analysis at a point or over user-defined regions (Point&ID), between any two points (LineScan, TruLine, and QuantLine), EDS element mapping (LayerMap, AutoLayer and TruMap), and EDS phase mapping (AutoPhaseMap)
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